Advances in research and development
John L. Vossen
Physics of thin films
Thin Films for Advanced Electronic Devices
Thin film processes
Mechanic and Dielectric Properties
Plasma Sources for Thin Film Deposition
Plasma Sources for Thin Film Deposition and Etching
Optical Characterization of Real Surface
Optical Characterization of Real Surfaces and Films
Thin Films for Emerging Applications
Plasma Sources for Thin Film Deposition and Etching Vol. 7